Table 4 Capacitance value simulated by ANSYS for the actuators in Table 1
From: A flexible model for studying fringe field effect on parallel plate actuators
Actuator no. | Voltage | Capacitance without fringe effect | Capacitance with fringe effect | % Change |
|---|---|---|---|---|
1 | 8.18 | 3.573e−3 pf | 5.14e−3 pf | 43.82% |
2 | 8.76 | 6.266e−3 pf | 7.96e−3 pf | 27.03% |
3 | 7.26 | 10.49e−3 pf | 12.413e−3 pf | 18.33% |