Table 7 Computed Thickness with and without Fringe Effect
From: A flexible model for studying fringe field effect on parallel plate actuators
Plate thickness in µm | Pull-in voltage according to proposed model considering fringe field in volts | Pull-in voltage according to ANSYS and the model in [8] without considering fringe field in volts |
|---|---|---|
1.27 | 7.29 | 7.82 |
1.28 | 7.31 | 7.91 |
1.29 | 7.39 | 8 |
1.30 | 7.61 | 8.09 |
1.31 | 7.85 | 8.19 |
1.32 | 8.19 | – |