Table 1 Dimensions of three different actuators
From: A flexible model for studying fringe field effect on parallel plate actuators
Dimensions | Actuator 1 | Actuator 2 | Actuator 3 |
|---|---|---|---|
d | 4 | 3 | 2.15 |
L | 250 | 180 | 124 |
b | 5 | 8 | 10 |
h | 1.5 | 1.4 | 1.3 |
hp | 1.5 | 1.4 | 1.3 |
bp | 20 | 55 | 60 |
Lp | 50 | 25 | 30 |